Plasma surface coating equipment
Radiofrequency glow discharge system (RFGD)
The
RFGD is an in-house made equipment consisting of a large Pyrex tube
reactor (50 cm length, 13 cm diameter) with copper electrode placed on
the outside of the tube. The radiofrequency power (13.56 MHz) is
supplied to the electrodes by an ENI Power Systems Generator (Model ACG
3XL) through a matching network (RFC 5MW) to minimize the reflected
power. An Alcatel vacuum pump is used to obtain the required vacuum
measured by an MKS Baratron. Gases can be introduced into the reactor
trough special valves connected to an MKS 4-channel readout.
The RFGD system is used mainly for modification of polymer surfaces for various biomedical applications.
